APPLICATIONS
Ozone monitoring for semiconductor and industrial processes

Choose gas or dissolved ozone measurement according to the measurement point and operating conditions.
Semiconductor industry
For semiconductor-focused ozone gas monitoring projects, begin with the MIC500-OZ. Review the analyzer and sampling arrangement against the actual gas stream, concentration range and installation conditions.
For ozone in process water, review the dissolved ozone analyzer family separately. Gas and liquid applications require different instrument and sampling selections.
Information for selection
- Measurement point and gas or liquid composition
- Normal and maximum ozone concentration
- Sample pressure, temperature and flow
- Installation space and available power
- Required communication, analog and alarm outputs
Ozone generator output
Measure ozone concentration at the generator outlet to support output monitoring and process evaluation. Match the range and sampling conditions to the generator installation.
Water treatment and reuse
Explore ozone gas and dissolved ozone measurement for drinking water treatment, municipal wastewater reuse, industrial wastewater, and process or cooling water systems.
Other industrial ozone applications
Ozone is also used in exhaust and flue gas treatment, chemical and pharmaceutical processes, pulp and paper, and food and beverage operations. Share the actual measurement task so that the appropriate analyzer configuration can be reviewed.
Find the right analyzer for your measurement point
Send your target range, sample conditions, installation format and required outputs.
