Description
The MIC500-OZ (also designated MIC500OZ) is a wall-mounted analyzer for continuous ozone gas concentration measurement. It uses dual-path UV absorption with an LED light source.
Features
- Automatic zero calibration device
- Temperature and pressure compensation
- Ozone concentration, temperature and pressure display
- Built-in flowmeter, ozone exhaust destructor and inlet dust filter
- IP65 instrument enclosure
Technical Specifications
| Parameter | Specification |
|---|---|
| Measurement principle | Dual-path UV absorption |
| Light source | UV LED |
| Standard range | 0–300 g/Nm³ |
| Alternative ranges | 0–200, 0–100 or 0–50 g/Nm³; 0–1000 ppm |
| Display | 5-inch touchscreen; optional 7-inch touchscreen |
| Display resolution | 0.01 g/Nm³ |
| Sample gas flow | 0.5 ± 0.2 L/min |
| Inlet pressure | <0.1 MPa |
| Sampling | Positive pressure; optional negative pressure |
| Communication | RS-485 Modbus RTU |
| Analog output | Active 4–20 mA |
| Relays | High and low alarm outputs; one or two relay sets configurable |
| Power supply | AC 110–220 V |
| Ambient temperature | −20 to 50 °C |
| Dimensions (H × W × D) | 230 × 330 × 150 mm |
Alternative ranges are configuration options. Display resolution is not measurement accuracy.
Application and Selection
Applications include generator outlet and exhaust gas concentration monitoring. Exhaust gas measurement requires a dehumidification device. For semiconductor projects, confirm the gas composition, concentration range, pressure, temperature, flow and sampling arrangement for the specific process.



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